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Cooled Sputter Ion Source for Volatile Samples
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Toshio ICHIHARAa), Itsuo KATAKUSE*a), Hiroyuki ITOb), Tohru SAKURAIb), and Takekiyo MATSUOb)
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We have made a cooled sputter ion source for producing clusters of volatile samples. A sample holder was cooled by coolant sent by a tube pump from outside of vacuum chamber. The temperature at sample holder reached to -10°C. Stable ion current of mercury-secium clusters, (Hg)nCs+ type, were observed for long time.
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Key words:
Cooled ion source, Sputter source, Mercury clusters, Volatile samples
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