| Application of TG-MS to Investigate Formation Process of Ceramic Thin Films and Fine Powders |
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*a) Department of Industrial Chemistry, Faculty of Engineering, Tokyo Institute of Polytechnics (1583 Iiyama, Atsugishi, Kanagawa 243-0297, Japan) b) Department of Industrial Chemistry, College of Engineering, Nihon University (Tamura-machi, Koriyama-shi, Fukushima 963-8642, Japan) c) Department of Applied Chemistry, School of Engineering, Tokai University (1117 Kitakaname, Hiratsuka-shi, Kanagawa 259-1292, Japan) |
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| Applicability and prospect of TG-MS (Thermogravimetry coupled with Mass Spectrometry) was discussed by focusing to ceramic thin films and fine powders. TG-MS is applicable to clarify the formation process of the metal oxide films from the precursors which were, for example, dip-coated onto the substrate. TG-MS was discussed in comparison with the TDS (Thermal Desorption Spectroscopy) which was widely applied to the analysis of thin films. The investigation of the formation process of ceramic fine powders using TG-MS was also referred. | ||
| Key words: TG-MS, TDS, Ceramic, Thin film | ||
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