| Analysis of Electro-Ceramics by Laser Ablation -Inductively Coupled Plasma Mass Spectrometry (LA-ICP-MS) |
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*Material Analysis Technology Group, R&D Center, TDK Corporation (2-15-7 Higashi-Ohwada, Ichikawa-shi, Chiba 272-8558, Japan) |
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| Analysis of electro-ceramics devices requires quantitative analysis of major and minor elements with high sensitivity and a spatial resolution of 10 µm. A new semi-quantitative method was developed using Laser Ablation ICP-MS. Ferrite and ceramic samples were prepared to verify this method. Semi-quantitative values obtained by LA-ICP-MS were in good agreement with reference values obtained by X-ray fluorescence analysis (XRF). | ||
| Key words: Laser ablation, ICP-MS, Electro-ceramics, Semi-quantitative analysis | ||
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